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Semi-automatic RF probe system up to 250 GHz

IHP GmbH - Leibniz-Institut für innovative Mikroelektronik·Frankfurt (Oder), Germany·Deadline Jul 16, 2026 · 19 days left·Open·Supplies
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Original notice title

Germany – Instruments for measuring electrical quantities – 200 mm Semi-Automatic RF Probe System for On-Wafer Measurements up to 250 GHz

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High riskLow complexity
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Buyer

Name

IHP GmbH - Leibniz-Institut für innovative Mikroelektronik

Location

Frankfurt (Oder), DEU

Identifier

DE138996546

Lots (1)

LOT-0001

200 mm Semi-Automatic RF Probe System for On-Wafer Measurements up to 250 GHz

- Semi-automated 200 mm probe system for on-wafer measurements - Integrated controlled dry atmosphere to prevent condensation and ice formation during measurements below ambient temperature - System design with a defined interface architecture enabling integration of optional thermal chucks through standardized mechanical, electrical, and software interfaces - Automatic wafer size recognition (150 mm, 200 mm wafers and individual dies down to 5 × 5 mm) - Precision XY stage: minimum travel range 310 × 310 mm, repeatability < 1.0 µm, accuracy < 2.0 µm - Precision Z stage: minimum travel range 30 mm, repeatability < 1.0 µm, accuracy < 2.0 µm - Theta axis: ±5°, resolution ? 0.0001° - Controlled contact mechanism with repeatability ? 1 µm - Integrated vibration isolation and leveling table - Central operator console for control of all axes and system functions - Integrated keyboard and mouse tray - Power supply: 100-240 V AC, 50/60 Hz

SuppliesEU fundedElectronic submissionSME suitable

Location

Frankfurt (Oder), Germany

Category

Instruments

Procurement Details

Publication date
24 Jun 2026
Notice type
Contract notice — standard
Languages
German

Reference metadata

Notice subtype
16
Notice version
1
Legal basis
32014L0024

Reference IDs

Tender ID
432100-2026

Documents (2)

Procurement document 1Submission portal 1

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